Microfabrication technologies for biophotonic applications with miniaturized optical components and highly integrated optofluidic systems

• electron beam writing to master sub-micron optical and fluidic structures
• UV lithography for the prototyping of micro-fluidic structures
• UV exposure for integrated waveguide and fluid channel fabrication
• X-ray lithography and deep proton writing for fabrication of high aspect ratio micro-optical and micro-fluidic structures and there combinations
• Dip-pen lithography for nano-sized structure patterning and local immobilization
• Assembly and packaging methods to build up complex biophotonic systems
• Replication methods like injection moulding or hot embossing
• Nano imprint for low-cost replication of opto-fluidic components and systems
• Blow moulding for inner surface patterning of fluid channels

For more detailed information please consult the P4L database.