Lithography
- (near field) holography ( NFH) (1)
- E-beam writing (0)
- Grey tone lithography (0)
- Interference lithography (2)
- Laser writing (7)
- Proton lithography (3)
- UV mask lithography (3)
- X-ray lithography (1)
| Name | Category | Type | Expert(s) | Research Group |
|---|---|---|---|---|
| Phase Spatial Light Modulators | Fabrication and enabling technologies | Fabrication | UoM |